627B-15789 627B15789 MKS pressure transducer
| Brand/Manufacturer | MKS/GERMANY |
| Part Number | 627B-15789 |
| Alternate Part Number | 627B-15789 |
| Description | pressure transducer |
| Dimennsions | 3.7cm x 3.7cm x 7.2cm |
| Weight | 0.5kg |
Product Details
Features
Sensor operating temperature of 150°C & 160°C
All-Inconel capacitance sensor
High 45 psia overpressure rating for improved stability and
repeatability
Compact design fits small spaces
Internally-mounted solid state process relays for external control
Long-term performance in nitride CVD & metal etch
Specifications
Type: Pressure Transducer
Sensor Type: Capacitance Manometer
Measurement Type: Absolute
Full Scale Pressure Ranges: 1, 2, 3, 5, 10, 20, 100, 1000 Torr
Full Scale Range: 0.01% of Full Scale
Sensor Temperature: Controlled to 150°C or 160°C
Accuracy: 0.25% of Reading
Communication Protocol: EtherCAT®
Analog Output: 0 to 10 VDC into >10 ohm load
Analog Connector: 15-pin D-subminiture
Trip Relays: Two internally mounted process pressure trip relays
independently adjustable from 0.5% to 100% of full scale range
Zero Temperature Coefficient: 150°C Versions: 0.004% FS/°C (0.008%
Full Scale/°C for 1 Torr range) 160°C Versions: 0.008% FS/°C
(0.016% Full Scale/°C for 1 Torr range)
Span Temperature Coefficient: 0.02% Reading/°C
Response Time: 50 msec
Warm-up Time: 4 hours
Internal Volume: 6.3 cc
Ambient Operating Temperature: 15° to 50°C
Overpressure Limit: 45 psia
Power Requirements: +24 VDC or ±15 VDC, 1 amp at start up
About MKS
Our Technology Enables The Future MKS Instruments partners with
customers in the environmental monitoring, defense & security, life
sciences & research, process & industrial manufacturing, and thin
film industries to develop ground-breaking solutions to their
toughest technology challenges.
Our work enables our customers to be more successful, and our
societies to be safer and more productive.
MKS Instruments, Inc is the worldwide leader in technology
solutions for the markets we serve. We make the instruments,
subsystems and process control solutions that enable our customers
to measure, control, power, monitor and analyze the critical
parameters of the advanced processes that they manage.
The chances are high that you own or have consumed a product that
has been made possible by our technology.
Our people are world-class problem-solvers, operating at the
leading edge of science, engineering and technology. We have a
proud history of industry-changing innovation and we back it up
with a global support infrastructure that ensures we are there for
you throughout the life cycle of our solutions.
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