MC20A-30134 MC20A30134 MKS DeviceNet
| Brand/Manufacturer | MKS/GERMANY |
| Part Number | MC20A-30134 |
| Alternate Part Number | MC20A-30134 |
| Description | DeviceNet |
| Dimennsions | 7.6cm x 4.0cm x 11.2cm |
| Weight | 2.0kg |
Product Details
Specifications
Maximum Operating Outlet Pressure: 200 torr
Maximum Allowable Outlet Pressure Differential: 50 torr (between Q1
and Q2)
Normal Operating Pressure Differential: <150 torr (N2)
Proof Pressure: 1000 psig
Burst Pressure: 1500 psig
Input Flow Range: 5 to 100% of each channel Full Scale rating (N2
equivalent)
Ratio Control Range: 1:1 to 20:1 and 20:1 to 1:1
Ratio Accuracy: 2% of ratio set point
Ratio Repeatability & Reproducibility: 0.3% of ratio set point
Resolution: 0.02% of channel Full Scale
Zero Temperature Coefficient: 0.05% Full Scale/°C
Span Temperature Coefficient: 0.08% Reading/°C
Typical Settling Time: <2 seconds
Warm-up Time: <30 minutes
Operating Temperature: 10 to 40°C
About MKS
Our Technology Enables The Future MKS Instruments partners with
customers in the environmental monitoring, defense & security, life
sciences & research, process & industrial manufacturing, and thin
film industries to develop ground-breaking solutions to their
toughest technology challenges.
Our work enables our customers to be more successful, and our
societies to be safer and more productive.
MKS Instruments, Inc is the worldwide leader in technology
solutions for the markets we serve. We make the instruments,
subsystems and process control solutions that enable our customers
to measure, control, power, monitor and analyze the critical
parameters of the advanced processes that they manage.
The chances are high that you own or have consumed a product that
has been made possible by our technology.
Our people are world-class problem-solvers, operating at the
leading edge of science, engineering and technology. We have a
proud history of industry-changing innovation and we back it up
with a global support infrastructure that ensures we are there for
you throughout the life cycle of our solutions.
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