64-21140C 03-21140-06/F 02-33632-06/C ASM Board plc module
| Brand/Manufacturer | ASM/Netherlands |
| Part Number | 64-21140C 03-21140-06/F 02-33632-06/C |
| Alternate Part Number | 64-21140C 03-21140-06/F 02-33632-06/C |
| Description | ASM Board |
| Dimennsions | 18.8cm x 12.1cm x 4.6cm |
| Weight | 0.26kg |
Product Details
Source materials include SiCl4, SiHCl3, POCl13, GeCl4 and BBr3.
Other doping material can
also be controlled, provided that they vaporize with adequate
concentration for accurate
ratiodetection. Carrier gases include H2, He, N2, O2 and Ar.
Three outputs are provided : Source (0 to +5VDC); Carrier (0 to
+5VDC); Ratio (0 to +5VDC).
These outputs can be monitored with any 5 volt D.C. voltmeter with
a sensitivity of 1000
ohms/volt or more. A built-in valve varies the carrier mass flow
rate to control the source
gram/min. selected by an external control voltage.
A single small package contains the flowmeter section, ratio
detector, control valve and the
electronics.
COMMAND SETTING 0.1 to 5 vdc
OUTPUT INDICATION
1. SOURCE: 0.1-5 vdc linearly proportional to mass flow rate of
vaporized liquid
2. CARRIER: 0.1-5 vdc linearly proportional to mass flow rate of
carrier gas
3. RATIO: 0.1-5 vdc linearly proportional to ratio of vapor flow
(SCCM) to carrier flow (SCCM) scaled with 5 vdc = 50%
Note that when there is no bubbling (i.e. no control) Ratio=0 and
Carrier will reach value greater than 5vdc (typically 5.6 volts).
OUTPUT IMPEDANCE: 10 ohms maximum
RIPPLE: 50 mv p-p maximum
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